Nanocomposite-Based Microstructured Piezoresistive Pressure Sensors for Low-Pressure Measurement Range

Nanocomposite-Based Microstructured Piezoresistive Pressure Sensors for Low-Pressure Measurement Range

Piezoresistive pressure sensors capable of detecting ranges of low compressive stresses have been successfully fabricated and characterised. The 5.5 × 5 × 1.6 mm3 sensors consist of a planar aluminium top electrode and a microstructured bottom electrode containing a two-by-two array of truncated pyramids with a piezoresistive composite layer sandwiched in-between. The responses of two different...

Offset stable piezoresistive high-temperature pressure sensors based on silicon

The exploitation of new application fields and the drive to size reduction even in highly stable pressure sensing systems makes the extension of the operating temperature range of the microelectromechanical sensors (MEMS) essential. For this reason a silicon-based pressure sensor with an application temperature ranging up to 300 C and the associated manufacturing technology was developed. With ...

CNT-POLYIMIDE NANOCOMPOSITE PIEZORESISTIVE THIN FILM DEVICES FOR STRAIN AND PRESSURE MEASUREMENT by

GRAPHENE-POLYIMIDE NANOCOMPOSITE PIEZORESISTIVE THIN FILM DEVICE FOR STRAIN AND PRESSURE MEASUREMENT by

Surface-modified piezoresistive nanocomposite flexible pressure sensors with high sensitivity and wide linearity.

Flexible pressure sensors working in a low pressure range (<10 kPa) have become an important part of recent research due to their applications in "artificial skin", foldable electronics and so on. Several efforts have been focused on the high sensitivity of devices with the neglect of linearity which is essential for real applications. Here, we present a device with a new Gaussian random distri...